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DOI:
:2018,31(11):-
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基于频率自适应的航空用高精度硅谐振压力传感器的频率测试系统研究
谢波, 李亚东, 朱林, 项超, 鲁毓岚, 王军波, 陈德勇, 洪文
(中国科学院电子学研究所)
The study on the frequency adapted frequency measurement system of high accuracy resonant pressure sensor
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中文摘要: 本文介绍了一种基于自适应周期的快速频率采集的谐振式压力传感器的频率测试系统。该系统利用STM32输入捕获功能实现了快速高精度频率采集,响应时间小于20ms,测量范围10~150kHz,频率测量精度优于±0.05Hz。采用频率自适应的周期数迭代方法,明显提升了系统的频率测量范围和准确度,适用于传感器的频率变化过程。利用该系统进行传感器性能测试,20ms采样条件下传感器输出波动小于±5Pa;快速变温过程(5℃/min)传感器的输出与标准器的偏差小于±30Pa,满足航空用压力传感器的频率测试要求。
Abstract:This paper presented a self-adaptive method and frequency measurement system for the test of a resonant pressure sensor used in the airplane. The frequencies of the sensor were acquired by the INPUT CAPTURE of the STM32 series’ MCU within the response time of 20ms and the accuracy of ±0.05Hz at the range of 10~150kHz. The proposed frequency adapted iterative method was adopted to improve the frequency measurement range. The system was also used to characterize the sensor stability and the temperature behaviors. Test results show that the fluctuation of pressure of the sensor is less than 5Pa at the response time of 20ms, and the pressure error of is less than 30Pa at the condition that the temperature changed with a rate of 5℃/min.
文章编号:cg18000376     中图分类号:    文献标志码:
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谢波  李亚东  朱林  项超  鲁毓岚  王军波  陈德勇  洪文 中国科学院电子学研究所
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