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中文摘要: 电容式微超声换能器（CMUT）作为一种新型的MEMS器件，在空气耦合无损检测领域具有较大的研究价值；文章设计了一种在空气介质中使用的电容式微超声换能器阵列，阵列由8个阵元组成，每个阵元包含16个CMUT敏感单元；介绍了CMUT换能器的原理和设计方法，利用Field II仿真了不同参数下的阵列指向性；对加工出的CMUT阵列进行了表面形貌测试和声学实验测试。实验结果表明：所加工的CMUT阵列满足设计要求，实验结果同仿真结果一致。
Abstract:Capacitive micromachined ultrasonic transducer (CMUT) as a new type of MEMS device has great research value in the field of air coupled nondestructive testing. An Air-Coupled Capacitive Micromachined Ultrasonic Transducer(CMUT) array was designed in this paper. The array is composed of 8 elements. Each element contains 16 CMUT sensitive cells. The principle and design method of CMUT transducer were introduced. The directivity of the array was analyzed in different parameters with the aid of the Field II. The surface morphology of CMUT array was tested. An acoustic test about the directivity of the array was designed. The experiment showed that CMUT array met the design requirements, and the results were consistent with the simulation results.
文章编号：cg17000876 中图分类号： 文献标志码：
基金项目:国家自然科学基金
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