本文已被：浏览 1599次 下载 0次
中文摘要: 针对大量程纳米级精度测量难的问题，结合时栅传感器的基本原理，提出一种基于交变电场耦合的纳米时栅传感器。利用Nutt内插法对影响时栅精度的关键因素—时间量进行精密测量，降低了系统对插补脉冲频率的要求，提高了测量分辨率。采用SOPC技术设计纳米时栅信号处理系统，保证了系统高性能实时测量。实验结果表明，该系统能稳定正常工作，在行程200mm测量范围内，纳米时栅精度可达到±300nm。
Abstract:Aiming at the difficult of the large range nano-precision measurement, this paper combined with the basic principles of the time-grating sensor, proposed the nanometer time grating sensor that based on an alternating electric field coupling. Using Nutt interpolation method to measure the time precisely which is one of the key factors of time grating sensor, it can reduce the system requirements for the interpolation pulse frequency, and improve the measurement resolution. Using SOPC technology designed nanometer time-grating sensor signal processing system to ensure that the system is high-performance and real-time measurements. Experimental results show that the system can work steadily, within 200mm measuring range, nanometer time grating sensor precision can reach ± 300nm.
文章编号：cg13000805 中图分类号： 文献标志码：
基金项目:国家自然科学基金
引用文本：