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中文摘要: 针对目前对管道内检测器标记难和测量精度差的现状，提出了一种新型单片集成阵列式矢量声传感器。克服了现有矢量声传感器在油气管道内检测器方位估计中判断信号方位的不足，消除了左右舷模糊的问题。通过用ANSYS软件对阵列式矢量声传感器结构进行仿真，得出该阵列式矢量声传感器的灵敏度为2.05mV/Pa，一阶模态为438Hz，固有频率分别为438Hz。最后根据分析得出阵列式矢量声传感器在管道内检测器方位估计中的定位角度公式。
Abstract:In view of the present situation, the pipe marking difficult and poor measurement precision, a new-type monolithic integrated aligned array MEMS vector acoustic sensor has been put forward. The sensor overcomes the deficiency of the existing sound vector sensor judgment signal position in the oil and gas pipeline detector, and eliminates the port/starboard blur problem. By using ANSYS software for simulation aligned array vector acoustic sensor structure，the results show that the sensitivity of the aligned array vector acoustic sensor is 2.05 mV/Pa, the first-order modal is 438 Hz, the third order modal is 452 Hz, The natural frequency of the two sensitive components is respectively 452 Hz and 438 Hz. Finally, the Orientation Angle formula.of the aligned array vector acoustic sensor azimuth estimation in the pipeline internal detector is given.
文章编号：cg13000708 中图分类号： 文献标志码：
基金项目:国家自然科学基金资助项目（61127008）
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