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中文摘要: 介绍了一种使用多触点MEMS开关实现的新型可调微波MEMS低通滤波器, 应用MEMS制作工艺在石英衬底上实现滤波器结构．滤波器基于慢波共平面波导周期性结构, 具有尺寸小、插损低、可与单片微波集成电路工艺兼容等优点．滤波器截止频率的大小取决于MEMS开关的状态．实验结果表明, 当MEMS开关受到激励时, 低通滤波器的3-dB截止频率从12.5GHz转换至6.1GHz, 带内纹波小于0.5dB, 带外抑制大于40dB, 开关的驱动电压在25V左右．
中文关键词: 微机械系统(MEMS) 可调滤波器 共平面波导(CPW)结构 多触点MEMS开关
Abstract:A new type of tunable microwave microelectromechanical systems low-pass filters with MEMS switches is introduced and the structure has been realized on quartz substrate using MEMS fabrication technology. The filter based on slow-wave coplanar waveguide periodic structure exhibits excellent performance on small size, low insertion loss and is compatible with monolithic microwave integrated circuit technologies. The 3-dB cutoff frequency depends on the different states of MEMS switches. The tested results show that the passband ripple is less than 0.5 dB and the out-of-band rejection is better than 40 dB when the 3-dB cutoff frequency is changed from 12.5 GHz to 6.1 GHz with the MEMS switches actuated. The driven voltages of the switches are around 25 V.
keywords: microelectromechanical systems(MEMS) tunable filter periodic coplanar waveguide (CPW) MEMS switches
文章编号：cg080627 中图分类号： 文献标志码：
基金项目:
Liu Lei Guo Xing-long Ou-yang Wei-xia Lai Zong-sheng
Institute of Microelectronics Circuit and System, East China Normal University, Shanghai 200062, China
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