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中文摘要: 介绍一种新型电容测微仪。通过测头与测量电路的一体化设计，精缩了仪器体积；采用差动测头结构，减少了由于环境变化引起的测量误差；使用数字信号传输测量结果，增加了信号的传输距离，提高了抗干扰能力。给出了电容量和被测距离之间的非线性关系的直线拟合方法。研究结果表明：有效直径为3mm的传感器测量范围为±80 m，分辨力达到0.01 m，时间稳定性达到0.01 m/H。
Abstract:A new type of capacitance micrometer is introduced. Integrating the probe and metering circuit minifies the instrument volume. Using a differential structured sensor reduces measure error. And also digital signal is applied to increase the signal transmitting range and to raise anti-jamming ability. The paper puts forward a linear fitting method of non-linear relation between capacitance and distance measure. The study shows that the sensor has a measuring range of ±80 m, the resolving power of 0.01 m and the time stability of 0.01 m/H with a 3mm effective diameter.
文章编号：cg070712 中图分类号： 文献标志码：
基金项目:
LIU Yu WANG Bao-guang LIU Jian SUN Chun-sheng
State Key Laboratory of Precision Measurement Technology and Instruments
Tianjin University
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