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中文摘要: MEMS静电驱动结构的瞬时特性受其结构本身机械动态特性的影响，自然阻尼过高或者过低都可能会让系统发生操作偏差。利用状态空间分析法分析了MEMS静电驱动结构的工作机理。基于状态反馈原则设计了一种输入量控制方法，即根据系统要求指标来配置极点，实现最优控制。仿真实验结果证明，该方法能提高系统的瞬时特性。
Abstract:Transient response of electrostatically-actuated MEMS is dominated by their mechanical dynamics. The performance of such system may be poor, if the natural damping of the system is very low or very high. The work mechanics of the electrostatically-actuated MEMS is discussed based on the state space method. Based on the state feedback, one input control strategy is presented to implement optimum control, which allocates poles according to the system requirements. The simulation results demonstrate that the improvement of transient behavior is achieved by proposed strategy.
keywords: electrostatically actuated MEMS transient behavior state feedback input control state space
文章编号：cg060507 中图分类号： 文献标志码：
基金项目:
FENG Ren-jian YU Shang-min WAN Jiang-wen WU Yin-feng
Beijing University of Posts and Telecommunications, Beijing 100876, China
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