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中文摘要: 提出了用声表面波滤波器测知加速度方向和大小的原理和方法，研究了电容器中的静电吸引力对加速度计敏感质量块的位置稳定作用，以及用它扩大悬臂梁式加速度计量程的原理。还对静电力扩程之后，加速度计测量值的校准、计量标定等问题进行了有益地探讨，针对电容器静电力的非线性扩程特点，提出了查询表式的在线实时测量换算读值方案。
中文关键词: 悬臂梁式声表面波加速度计 声表面波滤波器 扩大量程：计量校准和标定
Abstract:A new method using surface acoustic wave filter (SAWF) and electronic force in parallel-plate Capacitor for enlarging measure range of accelerometer with cantilever beam is put forward. The electronic force’s stabilizing position function to sensitive mass block with negative feedback and the elementary principle for enlarging measure range are discussed. The rectifying and demarcating method to the accelerometer with cantilever beam are researched after enlarging measurement range. A plan about “Inquiring table on time for the measurement” is prompted.
文章编号：cg060227 中图分类号： 文献标志码：
基金项目:
Liu Jun-yaoChen-Ming
College of Automatic Control, Northwestern Polytechnical University, Xi’an 710072，China
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