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中文摘要: 利用脉冲YAG 激光微加工方法, 在三氧化二铝陶瓷基片上一面集成了RuO2 加热器, 另一面集成了四单元电
极制备了纳米气敏传感器阵列。对阵列的加热特性、热响应、温度分布及气敏性能作了深入的探讨。阵列单元平
均能耗低于500 mW、热响应速度小于20 s、平面温度梯度小于5 ?? / mm、能充分拾取气敏材料的气敏信息, 阵列气敏
性能稳定性、重现性好。研究表明激光微加工方法制作纳米气敏传感器阵列是一种可控性好、灵活、方便、廉价的
制作方法。
Abstract:Nano gas sensor arrays were manufactured through the pulsed YAG laser micromachining of Al2O3 plates.
The RuO2 heater and the electrodes were integrated onto two sides of plates, respect ively. Some important characteris??
tics of the arrays, such as the heating properties, the temperature??time curve, the temperature distribution on the ar??
rays, the sensitivity of the integrated gas sensor arrays were investigated. The average power consumption per unit, the
thermal responsive time, the plane temperature distribution gradient was 500 mW, 20 s, 5 ?? ??mm, respctively. The
sensitivity of the different arrays was high, stable, and repeatable. The results show that YAG laser micro??machining
of Al2O3 plates used for the manufacture of the gas sensor arrays is easily controllable, flexible, convenient and cheap.
文章编号：cg040432 中图分类号： 文献标志码：
基金项目:
BAI Zi??kui WANG Ai??hua XIE Chang??sheng
Dep . of Materials Science and Engineering , Huazhong Univ of Science and Technology , Wuhan, 430074, China
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