| 摘要:本文介绍了一种新的微结构制造技术———软光刻技术,它提供了一种方便、有效的和低成本的微米、纳米尺
寸微结构的制造方法. 本文着重涉及了软光刻的几项关键技术:弹性印模、再铸模等,阐述了模板的制备方法和原
理,并应用这种模板实现微阀和微毛细管. |
| 关键词: 软光刻 再铸模 微毛细管 微阀,PDMS |
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| Three Dimension Micro2structure Soft Lithography Technology |
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| Abstract:This paper describes a novel microstructure fabrication technology based on soft lithography , which provides
a convenient , effective , and low2cost method for the formation and manufacturing of micro and nanostructure. Also we
discuss some key techniques of soft lithography , such as elastmeric stamp , replica molding. At last , the three2dimension
micro2capillary and micro2valve is fabricated on the glass using soft lithography method. |
| Key words: sotf lithography replica molding micro2capillary micro2ralve PDMS |